

wafer-side
wafer-front


Sigma Series
INTELLIGENT WAFER AOI MACHINE
A high throughput and reliable inspection on defects for various wafer types with high resolution color 2D imaging and fully automated wafer handling mechanisms. Ideal Vision’s patented HDCompozite™ combines both 2D imaging and 3D metrology to deliver an exceptional inspection for bump height as an optional enhancement. The system is also powered by JÄGER® vision software that designed for high speed and precise vision inspection application.
Features:
- Modular Design
- Automatic Loading and Unloading
- Wafer Pre-Alignment
- Support Dual Inspection Station
- Image Processing Capability
- Comprehensive Vision Inspection Tools
- High Definition Composite 3D Inspection*
- Artificial Intelligent*